INFICON: Führt «Speed im Vakuum» zu Effizienzsteigerung ......25082015 3D Author Jeannette Alison...
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Quartalsanlass: Innovation macht's möglich INFICON: Führt «Speed im Vakuum» zu Effizienzsteigerung in der Halbleiterindustrie? Christian Berg, INFICON AG, Balzers (FL)
Transcript of INFICON: Führt «Speed im Vakuum» zu Effizienzsteigerung ......25082015 3D Author Jeannette Alison...
Quartalsanlass: Innovation macht's möglich
INFICON: Führt «Speed im Vakuum» zu Effizienzsteigerung in der Halbleiterindustrie?
Christian Berg, INFICON AG, Balzers (FL)
Moore’s law
0
1
10
100DRAM price in nano$ per Bit
1998
2016
Semiconductor Industry is built on
VACUUM
INFICON is a VACUUM company
… some technical background
… some technical background
10msVacuum is slow
… measurement used to be slower
… some technical background
10msHigh-Speed
changed that:à “See” Vacuum
“See” vacuum
new usedPumping “signature”
Conventional sensorSTRIPE high speed
Example: Membrane Pump
“See” vacuum
1 cycle = 1 Å = 0.1nm
p X X
Example: Atomic Layer Deposition (ALD)
Semiconductor Industry
1. 2.
Semiconductor Industry
o 50 B$ annual CapEx in production toolso One 300mm fab 1.5 - 2 B$o 7x24 operation
o CapEx Burn rate 0.5 - 0.75 M$ / day / fab
Semiconductor Industry
o One unscheduled stop every 3rd yearo Causes 150-200 M$ over lifetime for 65 fabso Mitigation 1 M$ investment in high speed
1 : 200
There is more …
Monitoring TOOL SPEED PRECISION
Tool Speed
10ms
BON1 : 1000
Precision
Trigger period
Oscillator tuning
Output (mean)
Con
vent
iona
l
?0
1
10
100
