Report - 2 Materialeigenschaften der III-V Nitridebibd.uni-giessen.de/gdoc/2000/uni/d000048/d000048e.pdf · Al2O3 2040 [Fra] 3,5 8,3 [Fra] 6H-SiC 1200 [Lan84a] 4,9 3,2* Si 1150 [Lan84b] 1,5

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