Report - Ionenstrahl-gestützte Beschichtung und Bearbeitung · 2004. 5. 26. · 1 l 2 l 3 z 1 z 2 z 3 Substrat Schicht C 1 C 2 C 3 Aluminium-beschichtung DC theo.: 10-7 pF DC typ.: 0,1 pF

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