Report - White Light Interferometer - TSRI · 2020-05-14 · 簡諧運動的頻率範圍為1 Hz ~ 3.9 kHz，加速度振動G 值範圍為0.02G~20 G。待量測的 晶片可在測試版子(PCB)上鑽孔固定於治具上，螺孔大小為2.5

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