18.05.2011

18.05.2011 Matthias Bergholz DESY Zeuthen

1

Mpix Sensors

25. März 2011

12 11 10 9 8 7 6 5 4 123

12 1

Pixel 32…1

8

Line

1

N S

E

W


3

Measurements

• C/V and I/V bias ring

• Cint, Rint

• I/V and C/V pixel

• Rbias ,RPT

Measured sensors

-> Sensors had no ceramic support and was send back to CERN (setup up for glued sensors is under construction )18.05.2011 Matthias Bergholz

DESY Zeuthen

4

Cint CVbias Rint IVBias Rbias Itotal Ctotal

FZ120N-05-Mpix-1 X X O X for Rpoly x x

FZ120Y-010-Mpix-2 X X O X for Rpoly x x


FZ200P-03-Mpix-1 X X O X for Rpoly

FZ200Y-03-Mpix-1 X X O X for Rpoly




FZ320P-02-Mpix-2 X X O X for Rpoly

O measured but only information that Rint<<Rbias

18.05.2011

Bias Ring I/V

0 -100 -200 -300 -400 -500 -600 -7000

-10n

-20n

-30n

-40n

-50n

12-120 11-120 10-100 9-100 8-120 7-120 6-80 5-80 4-100 3-100 2-120 1-120

I/V Bias Ring -FZ200P-03-Mpix-1

Curr

ent [

A]

Voltage [V]

0 -100 -200 -300 -400 -500 -600 -7000

-10n

-20n

-30n

-40n

-50n

even numbers = poly siliconuneven numbers = punch troughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m

I/V Bias RingFZ200Y-03-Mpix-2

Cu

rre

nt [

A]

Voltage [V]

1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80

5Matthias Bergholz DESY Zeuthen

0 100 200 300 400 500 600 7000.0

10.0n

20.0n

30.0n

40.0n

50.0n

even numbers = poly siliconuneven numbers = punch troughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m

I/V Bias Ring -FZ200N-06-Mpix-2

Cur

ren

t [A

]

1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80

Voltage [V]


6

Depletion Voltagefrom Bias ring C/V

0 -100 -200 -300 -4000

1e21

2e21

6-80

FZ320P-02-Mpix-2

1/C

2 [1/

F2 ]

Voltage [V]

254V

1 2 3 4 5 6 7 8 9 10 11 120

100

200

300Depletion Voltage

Averange 3 Pixel FZ120N FZ200N FZ200P FZ200Y FZ200Y-2 FZ320N FZ320P FZ320Y

Vo

ltag

e [V

]

Region number

0 200 4000

1e21

2e21

3e21

4e21

5e21

6e21

7e21Punch ThroughC/V Bias Ring 1-120

2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80

1/C

2 [a.u

.]

Voltage [V]

Poly Silicon

18.05.2011 Matthias BergholzDESY Zeuthen

7

Cint

0 -100 -200 -300 -4000.0

50.0f

100.0f

150.0f

200.0f

250.0f Cint

- FZ200Y-03-Mpix2

5-80, Pixel 8

Cap

acita

nce

[F]

Voltage [V]

even numbers = poly siliconodd numbers = punch through

regions 1-6 pixel length = 2421mmregions 7-12 pixel length = 1171mm

1 2 3 4 5 6 7 8 9 10 11 120

50

100

150

200

250Averange of 3 Pixel

FZ120N FZ200N FZ200P FZ200Y FZ200Y-2 FZ320N FZ320P FZ320Y

Cint

@ 450V

Ca

paci

tan

ce [f

F]

Region number


8

RBias for poly silicon

-2 -1 0 1 2-1µ

-500n

0

500n

1µ

Rpoly

= 2.5 resp. 5.0

Averange of 3 Pixel

2-120 4-100 6-80 8-120 10-100 12-80

Rpoly

- FZ200Y-03-Mpix-2

Curr

ent [

A]

Voltage [V]2 4 6 8 10 12

2

3

4

5

6

7

8

9

Averange of 3 Pixel FZ120N FZ200N FZ200P FZ200Y FZ200Y-2 FZ320N FZ320P FZ320Y

Rbias

for poly silicon

Re

sist

an

ce [M

]

Region number


9

I/V Pixel

0 -100 -200 -300 -400 -500 -600 -7000

-50p

-100p

-150p

-200p Itotal

- FZ200P-03-Mpix2

3-100 (punch through) 4-100 (poly silicon)C

urre

nt [

A]

Voltage [V]1 2 3 4 5 6 7 8 9 10 11 12

0

100

200

300

400

500 Itotal

@ (Vdp

+10%)

Averange of 3 Pixel FZ120N FZ200N FZ200Y FZ320N FZ320PC

urr

ent [

pA]

Region number

300V - 320 m

200V -120, 200m


10

C/V Pixel

-100 -200 -300 -4000.0

500.0f

1.0p

1.5p

2.0p

3-100 (punch through) 4-100 (poly silicon)

Ctotal

- FZ200Y-03-Mpix2

Cap

acita

nce

[F]

Voltage [V]

2 4 6 8 10 12

0

500

1000

1500

2000

2500

3000

3500

Averange of 3 Pixel FZ120N FZ200N FZ200Y FZ320N FZ320P

Cap

aci

tan

ce [f

F]

Region number

Ctotal

@ 450V - C/V of 3 Pixel

Rint

18.05.2011

BP

A

Bias Ring

Guard Ring

DC-PADs

VDC

Rb Rb

Rint

Ib >> Iint

-5 -4 -3 -2 -1 0 1 2 3 4 50.0

-50.0p

-100.0p

-150.0p

-200.0p

-250.0p

-300.0p

-350.0p

600V - 1,69T 500V - 1,44T 400V - 0,82T 300V - 0,35T 200V - 1,11T 100V - 0,71T

Cu

rre

nt [

A]

Voltage [V]

Current between to pixel

-5 -4 -3 -2 -1 0 1 2 3 4 5-290.0p

-288.0p

-286.0p

-284.0p

-282.0p

Cu

rre

nt [

A]

Voltage [V]

Equation y = a + b*x

Weight No Weighting

Residual Sum of Squares

1.34031E-24

Adj. R-Square 0.98425

Value Standard Error

Keithley.6585_1 Intercept -2.85745E-10 5.79583E-14

Keithley.6585_1 Slope 6.77013E-13 1.9143E-14

Rint

Rint

~ 1T

Matthias Bergholz DESY Zeuthen

11

BP

A

Bias Ring

Guard Ring

DC-PADs

AH

H

|UDC = 500V|

BP

Bias ring

RPT U

A

Rpunch

RPT

RU

RI

=106…109

=2*107

=2*107

Matthias Bergholz DESY Zeuthen

1218.05.2011

-> Electrometer and current source is needed

Robert Eber, KIT

Open Points

• Switching matrix is in preparation

• Setup up for glued sensors is planed by an engineer

• Alibava read out electronic arrived Zeuthen and first tests were done, now we have to do the final construction (thanks to Karlsruhe & Hamburg for discussions)


13

Appendix

Measurement setup -1

Pixel I/V and C/V

Bia

sA

dapt

er

LCR

Met

er

BP

Gu

ard

Rin

g

L

H

Bia

s R

ing

Bia

s R

ing

AD

C-P

AD

s

BP

Gu

ard

Rin

g

Measurement setup -2

Rbias and Cint

VD

C

SampleChuck

BP

Bia

s R

ing

A

DC

-PA

D

Gu

ard

Rin

g

LCR

Met

er

BP

A

Bia

s R

ing

H

LGuard Ring

0 -100 -200 -300 -400 -500 -600 -700

0.0

10.0p

20.0p

30.0p

40.0p

50.0p

60.0p

70.0p

1 2 3

Itotal

Cur

rent

[A

]

Voltage [V]

0 100 200 300 40020.0f

40.0f

60.0f

80.0f

100.0f

120.0f

140.0f

160.0f

Cint

1 2 3

Cap

acita

nce[

F]

Voltage [V]

18.05.2011

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