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Page 1: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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251

Bull. Earthq. Res. Inst.

Univ. Tokyo

Vol. pp.

* email : f [email protected]

JGI Inc.

Earthquake Research Institute, the University of Tokyo

Technology for imaging the lithospheric structure using earthquakes, such as receiver func-

tions and seismic interferometry, have advanced greatly in the last decade. Three component, low

cost accelerometer sensors have been constructed using Micro Electro Mechanical System (MEMS)

technology, and are providing new opportunities for earthquake observations. To evaluate the fea-

sibility of MEMS sensors for earthquake observations, dense seismic array observations were

carried out using MEMS sensors in Mizusawa district, northern Honshu, Japan, for three months in

. In comparison with observed seismograms of velocity sensors, MEMS sensors show high

performance for local and regional earthquakes. However, due to high-noise levels from the sensor

itself at lower frequencies, MEMS sensors are not adequate for recording teleseismic waves.

: MEMS sensor, earthquake observations, imaging of lithosphere

MEMS

Wilson

and Aster, ; Ruigrok

;

Wu :

MEMS

Abe MEMS

MEMS Micro Electro Mechanical System

*

Fumitoshi Murakami *, Hiroshi Sato , Toru Kuroda , Susumu Abe and Naoko Kato

et al.,

et al.,

et al.,

Abstract

Key words

MEMS

Evaluation of MEMS Accelerometer Sensor for Earth-

quake Observations

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Page 2: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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tive MEMS accelerometer sensor after Yamada ( ).

Fig. .

Fig. . Frequency and intensity range of acceleration for various objects of oscillation

observation and corresponding accelerometer sensors modified after Ohtake ( ).

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Fig. . Outlook of Digital- MEMS accelerometer sensor and its electronics

unit by Colibrys Ltd. ( ).

Colibrys Ltd.,

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Page 4: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Block diagram and electrical connections of analog-output type MEMS accelerometer

sensor by Colibrys Ltd. ( ).

Fig. . Block diagram and electrical connections of digital-output type MEMS

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Page 5: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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with analog-output type MEMS accelerometer sensor.

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Table . Main specifications of MEMS accelerometer sensors.

mm, . kg Table

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MEMS

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Page 6: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Table . Basic specification of the recording system employed with digital-output type MEMS accelerometer sensor.

Fig. . Configuration of earthquake observation system employed with analog-output type

MEMS accelerometer sensor.

Fig. . Outlook of earthquake observation system employed with digital-output type MEMS accelerometer sensor.

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Page 7: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Configuration of earthquake observation system employed with digital-output type

MEMS accelerometer sensor.

Fig. . Comparison of observed waveforms of impulsive seismic source by analog-output type and digital-output

type MEMS accelerometer sensors. Right-hand side shows figures of spectrum comparison (top), amplitude ratio

(middle), phase di erence (bottom).

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Page 8: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Observed waveform of vibrator sweep seismic source by analog-output type MEMS accelerometer

sensor. Sweep frequency : Hz, Sweep length : sec., Taper length : . sec.

Fig. . Observed waveform of vibrator sweep seismic source by digital-output type MEMS accelerometer

sensor. Sweep frequency : Hz, Sweep length : sec., Taper length : . sec.

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Page 9: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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late at night by analog-output type MEMS accelero-

meter sensor.

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Page 11: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Page 12: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Page 13: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Fig. . Comparison of amplitude spectrum for horizontal component of Digital-MEMS and . Hz geophone

sensor (Lennarz LE- D). Time integration was applied to the observed record of Digital MEMS.

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Page 14: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Page 15: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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Table . Combination of various profiling method. Table shows profiling methods, which

employ controlled seismic source and natural earthquake data, and corresponding resultant

subsurface profile and related seismic sensors.

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Page 16: Vol. pp. 2. ,**3 ,/+ ,00 ˘ˇˆ˙˝ MEMS Evaluation of MEMS ... · sibility of MEMS sensors for earthquake observations, dense seismic array observations were carried out using MEMS

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sensors : Some issues for consideration,

system, NE Japan, ,

Ruigrok, E., D. Draganov and K. Wapenaar, , Global-scale

seismic interferometry : theory and numerical examples,

Shragge, J., Artman, B. and Wilson, C., , Teleseismic shot-

Colibrys Ltd., , Product Description, Company Brochure.

, , .

.

Kato, N., Sato, H. and Umino, N., , Fault reactivation and

active tectonics on the fore-arc side of the back-arc rift

.

MEMS

No. .

, , doi : . /j. - . .

.

Sercel Inc., , Digital sensor unit C DSU/ XL, Com-

pany Brochure.

profile migration, , SI .

Wilson, D. and R. Aster, , Seismic imaging of the crust

and upper mantle using regularized joint receiver func-

tions, frequency-wave number filtering, and multimode

Kirchho migration, , B , doi :S -P .

. / JB .Abe, S., Kurashimo, E., Sato, H., Hirata, N., Iwasaki, T. and

Wu, F., Okaya, D., Sato, H. and Hirata, N., , InteractionKawanaka, T., , Interferometric seismic imaging

between two subducting plates under Tokyo and itsof crustal structure using scattered teleseismic waves,

possible e ects on seismic hazards,, No. , L , doi : . /

, L , doi : . / GL .GL .

, Buyers’ Guide NikkeiPS

Electronics, ..

(Received January , )

(Accepted March , )Gibson, J., Burnett, R., Ronen, S. and Watt, H., , MEMS

MEMS Hz The Leading Edge,

Journal of Structural Geology,

Geophy. Prosp.,

Geophysics,

J. Geophys. Res.,

Geophys. Res. Lett.,Geophys. Res. Lett.,

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