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Erfahrungsbericht eines erfolgreichen Antragstellers

29.04.2019

Corinna Grosse

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Project Identity

29.04.2019

NANOTEST;

48; 29%

TRT;

52; 32%

TUC; 40; 25%APC;

12; 7%

BTE;

12; 7%

PM PER PARTNER

NANOTEST;

316,8; 24%TRT;

475,9; 35%

TUC;

330,3; 25%

APC;

105,0; 8%

BTE;

105,0; 8%

FUNDING PER PARTNER

5 partners

3 countries

164 PMs

1.76 M€ budget

1.33 M€ funding (76%)

Work programme: Horizon 2020

Topic: ICT-31-2017 (Inf. Communic. Techn.)

Type of action: IA (Innovation Action)

Start: 01.01.2018

Duration: 36 Months

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Project Target

▪ INLINETEST targets the design, realization, devlopment and

test of two novel in-line inspection systems for

micro/nano-electronic components. Thereby, the fast,

contactless and non-destructive full-field thermometric

methods of Pulse-Infrared Thermography (PIRT) and

Thermoreflectance (TR) are exploited for the first time to

enable 100% in-line production monitoring.

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Typical die attach failure

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SoA for non-destructive testing

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Stress measurement

chip

(in situ)

e.g. Schindler-Saefkow, et al, 2014

Encapsulated ok

Cross-sensitivity to

moisture swelling & T

Expensive dies

s

TransducerCrack

Scanning Acoustic

Microscopy

(ex situ)

e.g. Deplanque et al, 2008

R

Access from top

required

Moisture exposure

Problems w pores &

slopes

Pulse IR

Thermography

(ex situ)

e.g. May et al, 2012

T

Full field

Fast method, in-line

Access from top

required

Stress Die

Thermal structure

function method

(in situ)

e.g. Schweizer et al. 2009

SC

SR

Encapsulated ok

Not local

T (t)

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Project Objectives

29.04.2019

Pick & Place Sinter processIn-line quality

control of die attach ✓ |

F [N] / T [°C]

t ~ 100 s t < 200 s t ~ 60 s t ~ 100 s t ~ 60 s

Excitation

source

okChip

Sinter paste

Feedback loop

Stamps

VacuumTR

Data managementExcitation

sourceIR

EncapsulationIn-line quality control

pf Encapsulation

Feedback loop

flash

flash

IR-camera

sample holder

(XY)

sample

IR-lens

TR @ TRL 5IR @ TRL 6

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Consortium

▪ NANOTEST (SME) is a well-established test equipment

manufacturer and builds the in-line inspection system,

▪ TRT is a leading European microelectronic components and

systems manufacturer and global player and is to test the in-line

inspection system on their research production line for RF HEMT

components.

▪ BTE (SME) comes in as a tool manufacturer to incorporate the

envisaged equipment,

▪ APC (SME) owns a production line for micro/nano-electronic

components and will test the novel equipment under real life

conditions.

▪ TUC with longstanding expertise in thermal and reliability

engineering for test systems in cooperation with industry.

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Industrial advisory board (IAB)

Roles:

▪ Monitoring the general scientific and technological community in those research areas tackled by the

project to determine the state-of-the-art and industry evolution.

▪ Keeping abreast of industry technological trends.

▪ Feedback in terms of specific application requirements during the whole project (specification,

development, testing phases)

▪ Monitoring of the progress of scientific research and technological developments carried out in the

project.

▪ Connection between this project and related projects, networks of excellence, standardization bodies

and in general, with adjacent research communities.

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Dr. André Cardoso

AMKOR, Portugal

Dr. Reinhard Pufall

Infineon, GermanyJohn Janssen

NXP, Netherlands

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INLINETEST Interactions

29.04.2019

Technology

demonstrators

Intellectual

propertyMethodology

and design

flash

flash

IR-camera

sample holder

(XY)

sample

IR-lens

In-line Inspe-

ction systems

Heat PathTO270

Heat Path

QFN

Heat Path

TO 247 Power MCM Package

In-line controlling

in Thales assembly

and packaging line

In-line analysis tool

as add-on module

for Boschman

equipment

In-line defects

detecting in

Production

lines

End-usersIndustrial Advisory Board

Po

ten

tial

en

d-u

sers

Ind

ust

rial

req

uir

em

en

t

Consortium

Technology development

Sample development

Design & adaption

Sample development

Equipment manufacturing

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Exploitation roadmap

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Commercialization

IP Protection Technology Licensing

Methodology development and Proof of concept

Development of advanced packaging

technologies

Development of advanced packaging

equipment

2018 2019 2020 2021 2022

Technology proof-of-concept and

validation in lab

Demonstration & qualification of in-line

inspection systems

Two test systems for inline failure analysis

commercially available

Process optimization by 100% in-line mapping of assembled

and packaged components

Implementation of failure analysis systems into the

production lines

Production of proved high-end component for avionic and Aerospace application

20172016

Industrial equipment with failure analysis modules as

add-on option

Proved packaging technologies for mass and

costumer specific production

TRL 6 - 8

INLINETEST

Integration of inspection systems into packaging and

assembly equipment

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Work packages

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WP1; 16; 10%

WP2; 65; 39%

WP3; 61; 37%WP4; 11; 7%

WP5; 11; 7%

PM PER WP

# Partner Topic WP Leader Start End

WP1 APC Specification and end-user requirement Eef Boschman M1 M6

WP2 TUCDesign and realization of in-line

inspection systemsDaniel May M1 M24

WP3 NANOTESTIntegration and demonstration of in-line

inspectionsDan Wargulski M13 M36

WP4 TRT Dissemination and Exploitation Afshin Ziaei M1 M36

WP5 NANOTEST Project Management Mohamad Abo Ras M1 M36

WP1: Specification and End-User Requirement

WP2: Design and

Realization of in-

line Inspection

Systems

WP3: Integration

and Demonstration

of In-line

Inspections

WP4: Dissemination and Exploitation

WP

5: M

an

ag

em

en

t

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Gantt chart

29.04.2019

INLINETEST Gantt ChartActivity Duration 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36

WP1: Specification and End-User Requirement 1 6

Task 1.1: Specification of end-user requirements 1 3

Task 1.2: Specification of failure analysis methods and IR

& TR system components1 4

Task 1.3: Specification of samples for system verification 1 6

Task 1.4: Definition of data management and

specification of the measurement software1 6

WP2: Design and Realization of in-line Inspection

Systems1 24

Task 2.1: Adaption, Design and Conception of the IR and

TR Failure Analysis Systems1 6

Task 2.2: Design and Construction of Excitation Sources 4 23

Task 2.3: Development of Software Modules 4 23

Task 2.4: Development of industrial Samples 4 18

Task 2.5: Performance, Verification and Demonstration

under Laboratory Conditions12 24

WP3: Integration and Demonstration of In-line

Inspections13 36

Task 3.1: Preparation of Demonstration of in-line

inspection on Production Lines 13 24

Task 3.2: Adaption of the Measurement Systems for the

Integration13 31

Task 3.3: Final Integration and Interconnection with the

Production Lines25 36

Task 3.4: Final Demonstration of in-line Inspection on

industrial Scales and Conditions32 36

WP4: Dissemination and Exploitation 1 36

Task 4.1: Setup of Dissemination & Exploitation Team 1 6

Task 4.2: Create Business Model and Exploitation

activities1 12

Task 4.3: Dissemination 12 36

WP5: Project Management 1 36

Task 5.1: Overall legal and contractual management 1 36

Task 5.2: Financial and administrative management 1 36

Task 5.3: Monitoring of project activities and technical

work progress 1 36

Task 5.4: Quality assurance and risk management 1 36

Task 5.5: Coordination of knowledge management and

other IP-related activities1 36

Completed

On going

Just started

On going

On going

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Workplan

29.04.2019

Specification

End-user

requirementsFailures Samples

Software/

Interfaces

Develop/adapt

IR-FA system

Develop/adapt

TR-FA system

Demonstration on industrial samples (in lab, SME site)

IR-FA system integration

into production

TR-FA system integration

into production

Rese

arc

hD

evelo

pm

en

t

Start

M36

Dem

on

stra

tio

n

Demo on industrial samples (in-line, end-user site)

MS1

MS3

MS5

Mark

et

rep

lica

tio

n

M30

MS2

MS4

In-line FA systems completely verified in industrial production

lines

Marketing to project partners and new end-users

M6

M18

M24

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Arbeit EU Projekt

▪ Gründe: Unterschiedliche Ansätze, Arbeitsweisen, Ideen

Experten in Spezialgebieten, die man ggf in Deutschland nicht findet

Direkte Zusammenarbeit mit End-Nutzer der entwickeltenGeräte

…

▪ Wichtig im Projekt: Ständige Kommunikation, nicht nur alle 6 Monate in

Meetings

Klare Aufgaben und Ziele für Partner

Kritische Pfade bewusst machen

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Tipps zur Antragstellung

▪ Antragsteller selbst überzeugt von Idee

▪ 1 Person Hauptverantwortlicher für Schreiben des Antrags, der die zu schreibenden Abschnitte verteilt und sammelt. Gleichzeitiges Arbeiten an einem Dokument, oder Schreiben in Gruppen funktioniert meist nicht gut.

▪ Klare Aufgaben und Ziele im Projekt für alle Partner

▪ Fokussierung auf 1 Thema/1 Produkt (z.B. kompletterDemonstrator)

▪ Ab TRL 3-4 klarer Businessplan

▪ Industrie-Advisory Board

▪ Kritische Pfade bewusst machen (klare Zeitpläne, z.B. Probenvorbereitung gleich starten)

29.04.2019 Corinna Grosse